Indorerwamo za F-Theta zikoreshwa cyane hamwe n'indorerwamo za galvanometer scanning muri sisitemu zo gushushanya, gukata no gushyira ibimenyetso kuri laser. Ubusanzwe, indorerwamo za F-Theta ziguma munsi ya 1% kugira ngo zibashe gutanga ahantu nyaho mu murima uri ku gishushanyo.
Ubwihangane bw'umurambararo: +0/-0.13mm
Ubunini bwo kwihanganira: ± 0.25mm
Kwihanganira uburebure bw'ifatizo: ± 2%
Ihindagurika ry'Ubunini bw'Inkombe (ETV): ≤3 arc min.
Umwobo usobanutse: >90%
Surface Flatness: λ/4 per 1″ Dia@632.8nm
Ubwiza bw'ubuso: 40-20 SD
Igipfundikizo cya AR: R<0.2% kuri buri buso @10.6μ