Igenzura ry’ubuso bugoye, uburebure bw’intambwe n’ubugari bwa filime nto ku byuma bya semiconductor wafers, lenses z’amatara zigezweho n’ibice bitwikiriye rigena umusaruro utaziguye. Gupima icyuma gipima amatara hakoreshejwe uburyo bwa "contact probe" bikunda gukurura ingero zoroheje, mu gihe ibikoresho bisanzwe bipima amatara bidashobora gutanga ubuziranenge bwo ku rwego rwa nano. Ni gute wagera ku isuzuma ritangiza, ubuziranenge bwo ku rwego rwa nano buri hejuru cyane no kugenzura umusaruro mwinshi icyarimwe?
Interferometero nshya y'urumuri rwera rw'inganda ya Wavelength OE ifite uburyo bwo gupima interferometry ebyiri. Hamwe no kumenya aho umuntu aherereye, ikubiyemo imikorere yose kuva ku bushakashatsi n'iterambere byo muri laboratwari kugeza ku gukora kuri interineti.
Uburyo bwo Gupima Impande zombi z'Imbere (Dual Core Interferometry Modes) ku Gipimo cy'Ubuso bwose
Bitandukanye n'ibikoresho bipima hakoreshejwe uburyo bumwe, ubu buryo buhuza VSI (Vertical Scanning Interferometry) na PSI (Phase-Shifting Interferometry), bugahaza ibyifuzo bibiri by'ingenzi byo gupima hakoreshejwe imashini imwe.
| Ikintu cyo kugereranya | VSI / CSI | PSI |
|---|---|---|
| Ahantu hakuru hakoreshwa | Ubuso bubi, intambwe, imiterere y'ubutaka idakomeza kandi igoye | Ubuso bworoshye cyane, bukomeza kandi bw'indorerwamo |
| Ingano yo gupima uburebure ihagaze | Inzira nini; ishobora gupima imiyoboro miremire n'intambwe ndende | Intera nto; ntikwiriye ku ntambwe nini zonyine |
| Ubushobozi bwo guhagarara | Urwego rwa nanometero; sub-nanometero irashobora kugerwaho hakoreshejwe algorithms nziza | Ubushobozi bwo gusubiramo ibintu buri hejuru cyane; ubushobozi bwo gusubiramo ibintu bugera ku rwego rwa sub-nanometer ndetse no ku rwego rwa sub-angstrom |
| Kwihanganira ubukana bw'ubuso | Hejuru | Hasi |
| Impinduka mu cyiciro | Hafi nta na kimwe; umusaruro w'agaciro k'uburebure urahari | Ikosa ryo gupfunyika mu cyiciro cya 2π riterwa n'ikosa ryo gupfunyika |
| Gupima Umuvuduko | Bisaba gupima axial, buhoro buhoro | Muri rusange byihuse |
| Ubudahangarwa bwo Kunyeganyega | Ishobora gutembera mu gihe cyo gushakisha | Guhindura intera mu buryo bwinshi, bigatuma umuntu yumva amerewe nabi cyane |
| Porogaramu zisanzwe | Ubukana, uburebure bw'intambwe, imiterere mito, ubuso bukozwe mu mashini | Isuzuma ry'ubuso bugoye cyane, imiterere y'ubuso n'ubugari bw'ubuso |
PSI (Phase-Shifting Interferometry): Yihariye mu miterere mito y'uburebure na filime nto cyane, itanga ubushobozi bwo kureba mikorosikopi.
Indorerwamo y'indege
Indorerwamo ifite imiterere igororotse (indorerwamo ihindagurika)
Urugero rw'Ishusho y'Ifoto
Interferometry ya VSI Vertical Scanning: Yagenewe ibikoresho bifite uburebure bunini n'intambwe ndende; urwego rwuzuye rwo gupima ruboneka nta gusesengura ku buryo burambuye.
Udupira duto duto tw’urukiramende ku dupira twakozwe mu buryo bugezweho
Udupira duto twa Elliptical micro bump dushyirwa ku dupira twakozwe mu buryo bugezweho
urutonde rwa microlens
Ihujwe n'urumuri rwera rufite uburebure bwa nanometero 450–700, rushobora gukumira urumuri ruturutse ku mucyo mwinshi kandi rutanga ubushobozi bukomeye bwo kurwanya ingaruka mbi. Rufite irangi ry'ibice byinshi, iki gice cy'urumuri gifite ubushobozi buke bwo kugarura urumuri gishobora gutanga ibimenyetso bihamye kandi bitandukanye byo kubangamira urumuri, bigatanga ibisubizo nyabyo kandi byizewe byo gupima.
2. Ibisobanuro bya Nano-Grade byambere mu nganda, amakuru akurikiranwa kandi ahoraho igihe kirekire
-Ubu buryo bukoresha urumuri rw'umweru rwa LED rufite ubunini bw'uburebure bwa 550 nm, rufite ibipimo by'imikorere yo mu rwego rwo hejuru bihuye n'ibipimo ngenderwaho ku isi.
-Uburyo bwo gupima buhagaze: <1 nm, ikosa ryo gupima risubirwamo: <10 nm, ubuziranenge bwa nanometero nyayo
-Intera ntarengwa yo gupima ihagaze: 500 μm, nta gusimbuza gusubirwamo gukenewe ku miterere mito cyane.
-Umuvuduko wo gupima: 100 μm/s, gupima inshuro imwe gusa mu masegonda 10, kuringaniza uburyo bwo gusuzuma no kugenzura.
-Ikurikije amahame ngenderwaho ya NIST, algorithme yubatswemo yikora ituma amakuru akurikirana ahoraho, ikubahiriza amahame ngenderwaho ya QC ku nganda za semiconductor na optique.
| Ikintu | Igipimo |
| Gupima ubushobozi | Imiterere y'ubuso bwa 3D, ubukana bw'ubuso, uburebure bw'intambwe n'ubugari bwa filime y'ibikoresho bigarura urumuri n'ibice by'urumuri |
| Uburyo bwo Kubona Amakuru | Interferometry yo Gupima Ishusho Ihagaze (VSI) + Interferometry yo Guhindura Ishusho Ishusho Ihagaze (PSI) |
| Sisitemu yo Gupima | Uburyo bwo gupima bwa NIST bushobora gukurikiranwa + uburyo bwo gupima bwikora |
| Ingano yo gupima ihagaze | 500 μm |
| Aho bareba | 20× intego: 0.87 × 0.65 mm |
| Imikorere ya Kamera | Ubushobozi ntarengwa: 2048×2448; Igipimo cya Frame: 74 Fps; Ubujyakuzimu bwa Bit: 12 biti |
| Umuvuduko wo Gushakisha | 100 μm/s (Uburyo bwo gukora neza) |
| Amahitamo ya Lens y'Intego | Intego zo kongera ubwinshi bwa 20x / 50x zishobora gutegurwa |
| Igishushanyo mbonera cy'aho umuntu ashyira | Urubuga rwo kwitandukanya rwubatswemo ibintu bihindagurika, rufite uburyo bwo gushyiramo ibintu butambitse kandi buhagaze. |
| Igipimo Rusange (L×W×H) | 120 × 80 × 65 cm |
| Uburemere rusange | ≤58 kg |
3. Igishushanyo mbonera cy'akabati gahujwe n'inganda, gihuye n'umurongo w'ibikorwa bya laboratwari n'umusaruro
Yakorewe ahantu hakorerwa ubushakashatsi bwa siyansi haba mu nganda zikora ibintu byinshi ndetse no mu matsinda y’ubushakashatsi bwa siyansi, ifite ubushobozi bwo kuyishyiraho mu buryo bworoshye.
Urubuga rwo kwitandukanya rukora neza: Gupima neza munsi y'ihindagurika ry'uruganda, nta mbonerahamwe y'inyongera yo kwitandukanya ikenewe.
Imiterere y'ibikoresho bibiri: Ishyirwaho mu buryo butambitse cyangwa buhagaze, byoroshye guhuza n'imirongo ikora yikora n'aho gukorera muri laboratwari.
Umubiri muto ugizwe n'ibintu byose: Ikirenge gito gifite ingano ya cm 120 × 80 × 65, uburemere ≤ kg 58, uburyo bworoshye bwo gushyiramo ibintu aho biri.
Sisitemu yuzuye ihuza isoko ry'urumuri, igice kinini cya interferometer na module yo kugenzura. Gushyiramo no gukinisha nyuma yo gupakurura, nta guhindura inzira y'urumuri bigoye bisaba.
Uburyo bwo gukoresha mu buryo burambuye mu gukora ibintu bigezweho
Inganda zikora ibikoresho bya semiconductor: Isuzuma ry’imiterere y’ubutaka rya 3D n’uburebure bw’intambwe za wafer za silicon na micro-nano chips.
Precision Optics: Isuzuma ry'ubukana n'ubugari bwa firime ku birahuri by'amaso, intego n'ibintu by'amaso bitwikiriwe.
Imiterere mishya y'imitako: Isesengura ry'imiterere y'ubuso n'ubugari bw'imitako igaragara n'imitako yoroheje.
Laboratwari z'ubushakashatsi bwa siyansi: Isuzuma ry'imiterere ya micro-nano n'imiterere y'ibice by'ingenzi.
Dufite uburambe bw'imyaka myinshi mu bushakashatsi n'iterambere ry'amatara, Wavelength OE ikora ku giti cyayo inzira zose z'ingenzi z'amatara n'uburyo bwo gupima amatara y'umweru. Igenzura ryuzuye rya tekiniki kuva ku masoko y'urumuri, indorerwamo z'amaso kugeza kuri sisitemu zo gupima. Buri gikoresho gikorerwa isuzuma ry'uburyo bwinshi mbere yo gutanga. Dutanga ubufasha bwuzuye bwa tekiniki nyuma yo kugurisha kandi tugahindura ibisubizo byihariye byo gupima hashingiwe ku bunini bw'ibikoresho by'umukiriya n'ibisabwa ku murongo wo gukora wikora.
Igihe cyo kohereza: 15 Nyakanga-2026