Ikirahuri cya F-theta gifite uburebure butatu

Inama ku bicuruzwa | Ikirahuri cya F-theta gifite uburebure butatu

Indorerwamo zisanzwe zo gupima urumuri zikoreshwa muri laser zikunze gukoreshwa ku rugero rumwe rw'uburebure—guhinduranya indorerwamo zikoresha laser bitandukanye bitanga ubwihindurize bw'inyuma, ahantu hatagaragara neza, no gushyira ibimenyetso mu buryo butagaragara neza. Indorerwamo zo gupima urumuri zifite imigozi ibiri zishobora gukosora gusa itandukaniro rya chromatic hagati y'uburebure bubiri bw'uburebure.

Lens ya Achromatic Scan Lens ifite uburebure bwa 3 ni lens yihariye yo gupima uburebure bw'amabara, ikuraho icyarimwe imiterere itatu itandukanye ya laser. Imiterere yose uko ari itatu ifitanye isano n'iy'urumuri; guhinduranya imikorere bisaba guhindura isoko ya laser, nta mpamvu yo gusenya lens cyangwa kongera kuyishyira ku murongo. Ibi bituma iba nziza kuri sisitemu zo gutunganya ibintu byinshi.

Uruvange rw'uburebure bw'inganda rukunze gukoreshwa cyane: 355 nm (UV), 532 nm (icyatsi kibisi), na 1064 nm (IR).

Ibyiza by'imikorere y'ibanze y'amaso

1. Kuboneza uburebure bwa Parfocal Three-Wavelength hamwe n'ubwiza bw'ahantu buhoraho

Gukosora chromatic aberration icyarimwe kuri 355/532/1064 nm (cyangwa RGB yihariye, UV-VIS-SWIR band combinations). Imiterere y'umurongo w'ubunini bw'urumuri rw'ubunini uko ari butatu irahuye, ituma ahantu hose hagaragara neza, nta gutandukanya uburebure bw'umurongo cyangwa icyerekezo cy'ubugari bw'urumuri.

2.Ubuhanga bwo gutunganya ibintu hamwe n'ikosa rito ryo gushyira ahantu runaka

Uretse kuba chromatic aberration, field curvature, distortion, spherical aberration, na koma nabyo biranozwa. Uburyo bwo gupima f-theta neza cyane butuma umuntu ahitamo uburebure bw'umuraba hashingiwe ku bisabwa mu kazi. Uburyo bwo gutunganya ibice mu buryo bw'uburebure bwinshi butuma birushaho kunoza uburyo bwo gutunganya ibintu muri rusange.

3. Inzira yo mu murima muto n'uburyo bwiza bwo guhuza ahantu hose

Ingero z'Ikoreshwa

343 nm yo gukuraho ibikoresho by’umwimerere nka photoresist; 515 nm yo gukuraho icyuma cyangwa polysilicon mu bice by’ingufu; na 1030 nm yo gukuraho ITO mu bice by’ingufu. Ni byiza cyane mu gusana no kugenzura imbonerahamwe.

Ibipimo by'ibicuruzwa:

Igishushanyo mbonera cyihariye kiraboneka hakurikijwe ibisabwa nyabyo.