Icyerekezo cy'ibicuruzwa: Gushyushya hakoreshejwe laser kugira ngo hakorwe imashini ya semiconductor Wafer Annealing

Guteranya amashanyarazi mu buryo bwa Wafer ni igikorwa cy'ingenzi mu nganda za semiconductor, gikubiyemo gukora dopant, gusana lattice, no gushyiraho ultra-shallow junction (USJ). Guteranya amashanyarazi mu buryo busanzwe no gutunganya ubushyuhe vuba (RTP) bihura n'ikibazo cy'ubushyuhe bwinshi, gukwirakwiza amashanyarazi mu buryo budacungwa neza, no kuba bidahagije, bigatuma bidahagije ku nyubako z'ikoranabuhanga rigezweho kuri 7 nm, 5 nm, no hanze yabyo—cyane cyane ku miterere ya Gate-All-Around (GAA) na 3D NAND flash memory. Guteranya amashanyarazi mu buryo bwa Laser, hamwe n'imirasire yayo y'ingufu nyinshi, ubuziranenge bw'ahantu hanini, no gukwirakwiza amashanyarazi mu buryo buke, byagaragaye nk'inzira y'ingenzi y'iki gihe cyo guhaza ibi bisabwa mu nganda.

Ihame ry'ingenzi ryo gushyushya hakoreshejwe laser

Umutwe ushyushya wa laser wa Wave Optics ufite imiterere yihariye y'urumuri itanga imirasire ya laser ifite ingufu nyinshi kandi ijyanye n'ubushyuhe kugira ngo irangishe neza ubuso bwa wafer. Laser y'icyatsi kibisi itanga uburyo bwiza bwo gufata ibintu hamwe n'ibikoresho bishingiye kuri silicon (harimo na SiC), bigatuma ubushyuhe burushaho kuba bwiza nta kwangiza wafer. Ibi byoroshya kongera gukoresha urwego rwangiritse rwashyizwemo ion no gukora neza kwa dopant. Nyuma y'ibyo, ubushobozi bwo gutwara ubushyuhe bwinshi bw'urumuri butuma habaho gukonja vuba cyane, bigatuma imiterere ya lattice ikonjesha kandi ikagabanya gukwirakwira kwa dopant. Ubu buryo butanga neza inzira zijyamo cyane zifite ubushobozi bwo gukora neza kandi zigatuma inzira zijyamo zihagarara neza (zitunguranye).

Gushyushya hakoreshejwe laser ni ingenzi mu kunoza umusaruro wo gutunganya wafer

1. Ubumwe bw'umurabyo: Ingufu zihwanye z'ahantu hafite uburebure burenze 95% (bisanzwe), bikuraho gushonga cyane cyangwa gushonga munsi y'umurabyo.
2. Ingufu zihamye: Ihindagurika ry’ingufu rihoraho riri munsi ya 2%, rituma habaho ubwiza bwiza hagati y’ingufu n’ingufu.
3. Ubuziranenge bw'Ishusho y'Ubuso: Ibice by'urumuri bifite agaciro ka PV/RMS ka nanometer hamwe n'ihindagurika ry'umuraba rigenzurwa neza, birinda kwangirika kw'ahantu hashyushye.
4. Ubujyakuzimu bw'Icyerekezo n'Ishusho y'Umurabyo: Ubujyakuzimu bw'Icyerekezo bushobora guhindurwa hamwe n'ishusho y'umurabyo ihuza imirasire n'ishusho ishyigikira gusuzuma mu buryo bwuzuye imirasire minini.
5. Guhuza Uburebure bw'Umuraba: Byakozwe neza kugira ngo habeho imigozi ya silikoni na semiconductor zo mu gisekuru cya gatatu (urugero, SiC, GaN) irusheho gukoresha neza ingufu.

Ibyiza bitatu by'ingenzi ugereranyije no gukoresha ibirungo bisanzwe

1. Guhagarika neza cyane ikwirakwizwa ry’ibinyabutabire - Ubushyuhe bugarukira ku rugero rwa nanosecond kuva kuri milisegonda imwe kugeza kuri milisegonda imwe, aho ikwirakwizwa ry’ibinyabutabire hafi ya zero, ubushobozi budashobora kugerwaho hakoreshejwe imashini itera ibinyabutabire cyangwa RTP.

2. Ingengo y'imari iciriritse y'ubushyuhe n'ibyangiritse bike by'igikoresho - Ubuso bwa wafer gusa ni bwo bugira ubushyuhe bwinshi bw'igihe gito, bigatuma nta bushyuhe buhinduka ku gice cy'ubutaka cyangwa imiterere y'igikoresho kandi nta kwangirika kw'isura.

3. Guteranya neza ahantu hatoranijwe neza - Ahantu hashobora guhindurwa hakoresha micron beams support localized annealing for 3D integration and distributions united units.

Ingero z'Ikoreshwa

Porogaramu zirimo gukoresha source/drain, gusana channel, no gukoresha ohmic contact annealing kuri logic igezweho (GAA/CFET), DRAM/3D NAND, SiC/GaN power devices, SOI, na micro/nano devices. Laser annealing itanga umusaruro mwiza icyarimwe mu mikorere y'ibikoresho no ku musaruro wabyo.

Guteranya imirasire hakoreshejwe laser bihindura uburyo bwo gutunganya imirasire ya wafer kuva ku guteranya imirasire y’isi (igitambaro) kugeza ku guteranya imirasire y’inyuma. Ikoranabuhanga ryayo rikomeye ry’amatara rishyigikira gukomeza kwagura no gutera imbere mu mikorere y’udutsiko tw’imirasire tw’inyuma.

Urupapuro rw'ibisobanuro by'ibicuruzwa